REAL-PhD

Characterization of polysilicon thin films using in situ and ex situ spectroscopic ellipsometry

Petrik, Péter (1999) Characterization of polysilicon thin films using in situ and ex situ spectroscopic ellipsometry. PhD thesis, BME ; MTA MFA.

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Supervisor name: Gyulai, József
DOI identifier : -
Item Type: Thesis (PhD)
Subjects: Q Science / természettudomány > QC Physics / fizika
Depositing User: Erika Bilicsi
Date Deposited: 23 Aug 2013 09:49
Last Modified: 22 Jan 2014 08:35
URI: http://real-phd.mtak.hu/id/eprint/20

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